OPTICAL MEASUREMENT SYSTEM SOLUTION
WAFER LEVEL OPTICAL CHARACTERISTIC MEASUREMENT SYSTEM FOR DETECTOR
PRODUCT OVERVIEW
WAFER LEVEL OPTICAL CHARACTERISTIC MEASUREMENT SYSTEM FOR OPTICAL DETECTOR
Wafer Level Optical Characteristic Measurement System For Optical Detector is to test various optical characteristics of photo detector devices such as photodiodes, photo sensors, etc. under wafer level. In addition to measuring the electrical characteristics of the light-receiving optical semiconductor devices, it is possible to measure various optical characteristics by introducing measurement light under wafer condition.
By combining the prober system for semiconductor failure analysis such as semi-automatic prober, manual prober, with our Optical Measurement Optics M-Scope type I/PFW, light sources and measurement instruments, it is possible to analyze the electrical and optical characteristics of optical semiconductor devices under wafer level. Furthermore, it can be used for automatic measurement of mass-produced devices by combining with the semi-auto prober system.
FEATURE
- Wafer level electrical and optical testing of various photo detector devices in combination with manual/semi-automatic prober system
- Achieves automation, speedup, and efficiency of various types of measurements through the function of linking with Form Factor's semi-auto prober system.
- Synos’ M-Scope type I/PFW, Optical Measurement Optics For Prober, is equipped. Additionally, optical system selection and system upgrade are possible according to the measurement item.
- Synos’ Optical Measurement And Analysis Software, Optometrics Customized Version For PD, is equipped.
- Integrated system control software, having various functions such as semi-automatic prober control, management of optical and electrical analysis data acquired by Synos’ optical system and various measurement system, management of sample data and measurement recipe etc. is installed. It is available to both mass-production measurement and discrete measurement of individual sample.
APPLICATION
- Optical and electrical characteristic analysis of various photo detector devices such as photo diodes, photo sensing devices, etc. on wafer level
- I-V characteristics, optical sensitivity, dark current, capacitance, modulation characteristic, rise and fall characteristic, tolerance, cross talk, etc.
SYSTEM COMPONENT SELECTION
SYSTEM CONFIGURATION DIAGRAM
COMPONENT SELECTION
- Measurement optics selection
- Sophisticated Optical Measurement Optics For Prober M-Scope type I/PFW
- Synos' another optical measurement optics M-Scope series
- Objective Lens
- Coaxial epi-illumination unit
- Image sensor
- for 400~1100nm：High Resolution CMOS Detector ISA071/ISA071GL
- for 950~1700nm：InGaAs High Sensitivity NIR Detector ISA041H2
- for 400~1700nm : InGaAs High Resolution NIR Detector ISA041HRA/ISA041HRVA
- Probe station joint part
- Optical system adjustment mechanism (Motorized or manual stage system for optics)
- Motorized stage control system
- Mounting platform for prober system
- Probe station
- Semi-automatic prober system or manual prober system
- About prober system, please refer to Form Factor Web site
- System control and data analysis part
- PC for system control, data processing and analysis, data management
- Software for system control, data processing and analysis, data management Optometrics Customized Version For PD
- Interface etc. (cf. GPIB, image acquisition and processing hardware, etc.)
- Measurement instruments, measurement light sources
- Measurement instruments
- SMU (Source Measurement Unit), Optical Powermeter, Optical Component Analyzer, LCR Meter, Network Analyzer, Semiconductor Device Analyzer, etc.
- Measurement light source
- Various LD light source, Low coherent light source, Rf light source, etc.
- Accessory, peripherals
- Shield box
- Vibration isolated table
- System rack
OPTOMETRICS CUSTOMIZED VERSION FOR PD
The measurement items vary depending on the measurement target, measurement content, measuring instrument, measurement procedure, and operation method.
In the Optometrics Customized Version For PD, customization of software is needed through preliminary arrangement with customer. The following is an example of measurement items.
- Examples of analysis items of photo detector device
- I-V characteristic
- Optical sensitivity characteristic
- Tolerance/crosstalk etc.
- Capacitance
- Rf modulation characteristic
- Rise/fall characteristic
- For each of the above measurements, it is necessary to separately select appropriate measuring equipment such as measuring equipment and light sources.